Shield and cover for target of sputter coating apparatus



FIG. 1 is a perspective view of a shield and cover for target of sputtercoating apparatus embodying the design of the invention;

FIG. 2 is a top plan view of the shield and cover for target of sputtercoating apparatus of FIG. 1;

FIG. 3 is a bottom plan view of the shield and cover for target ofsputter coating apparatus of FIG. 1;

FIG. 4 is a side elevation view of the shield and cover for target ofsputter coating apparatus as seen from the bottom of FIG. 2;

FIG. 5 is a side elevation view of the shield and cover for target ofsputter coating apparatus as seen from the top of FIG. 2;

FIG. 6 is a side elevation view of the shield and cover for target ofsputter coating apparatus as seen from the left side of FIG. 2;

FIG. 7 is a side elevation view of the shield and cover for target ofsputter coating apparatus as seen from the right side of FIG. 2;

FIG. 8 is a cross-sectional view of the shield and cover for target ofsputter coating apparatus taken along the line 8--8 of FIG. 2; and,

FIG. 9 is a cross-sectional view of the shield and cover for target ofsputter coating apparatus taken along the line 9--9 of FIG. 2.

The ornamental design for a shield and cover for target of sputtercoating apparatus, as shown and described.